pragovac 2001

ZPRAVODAJ C VS 10 (3-4), 2001
str.1
Obsah
PRAGOVAC 2001
2
The Influence of Backing Turbomolecular Pumps on the Hydrogen Partial
Pressure in High Vacuum Systems (Dr. Rudolf. Lachenmann)
2
Nekolik zajı
mavostıze sortimentu firmy LEYBOLD
9
Novinky roku 2001 firmy Pfeiffer Vacuum (R. Salomonovic , Z. Hulek)
11
Predstavujeme firmy
13
Ferrotec GmbH
13
TESCAN, s.r.o.
15
Moz nosti kalibracımeridel vakua v C R
16
C SN tykajı
cıse vakuová techniky
18
Vakuova technika v povalec nych letech II. (vzpomı
na Libor Paty)
19
Kalrezš (Pavel Drasar)
21
VaQum - 1.International Trade Fair for Vacuum Technology and Vacuum
Applications in Magdeburg
22
Informace o C VS najdete na adrese http://mbox.troja.mff.cuni.cz/~CVS
Zpravodaj C eská vakuová spolec nosti, c tvrtletnı
k, ktery pro svá c leny, k dokumentac nı
ma
propagac nı
m –c elum vydava C eska vakuova spolec nost v Praze (Sekretariat C VS, c/o
Sdruz enıMFF UK „ Vakuum Praha, V Holesovic kach 2. 180 00 Praha 8, telefon (02)
21912636, telefax (02) 21912620. E-mail [email protected], IC O 61381811), ISSN
1213-2705, Evidovan jako periodikum u MK C R pod evidenc nı
m cı
slem MK C R E 11156
ZPRAVODAJ C VS 10 (3-4), 2001
str.2
PRAGOVAC 2001
Za, v historii techto seminaru a setkanıvyrobcu a uz ivatelu vakuová techniky rekordnı
–c asti 17 firem z tuzemska i ze zahranic ıprobehl dne 14. 11. 2001 jubilejnıdesaty
PRAGOVAC. V predvec er vlastnıvystavy a seminare byla usporadana slavnostnıvec ere za
–c asti zastupcu z–c astnenych firem a zastupcu Nemecká vakuová spolec nosti a Slovenská
vakuová spolec nosti.
Jako jiz tradic ne prinası
me ve Zpravodaji ty prı
spevky prednesená na seminari, která
nam autori poskytli ke zverejnenı
.
The Influence of Backing Turbomolecular Pumps on the
Hydrogen Partial Pressure in High Vacuum Systems
Dr. Rudolf. Lachenmann, VACUUBRAND GMBH + CO KG; 97877 Wertheim, Germany
Introduction
For many years, turbomolecular pumps are being successfully used for the generation of
high and ultra-high vacuum. They are easy to use and show a high degree of operating
reliability. The generated high vacuum is considered “ clean° or free of hydrocarbon
contamination. Backstreaming of lubricant vapors is drastically reduced by the extremely high
compression ratio of the turbomolecular pump for heavy molecules. Therefore, only during
standstill can oil and other lubricant vapors from the backing pump, mostly oil-sealed rotary
vane pumps, migrate back into the process chamber. Recent developments of turbomolecular
pumps with discharge pressures up to 30 mbar allow the use of small, oil-free diaphragm
pumps as backing pumps. If these so called “ wide-range° turbomolecular pumps are
magnetically levitated, this combination offers a completely oil-free high vacuum. Any
hydrocarbon contamination is eliminated even at standstill.
Another important aspect of the residual gas composition of UHV/HV systems is the
occurrence of light gases, i.e. H2, He and H2O. Turbomolecular pumps have the lowest
compression ratios for gases with low molecular weight. Especially, if hydrogen is used as a
process gas, the ultimate vacuum is limited by hydrogen due to the compression ratio of the
turbomolecular pump. Also, the question is how the residual gas composition, particularly the
hydrogen partial pressure, depends on the fore-line pressure and type of backing pump.
Experimental Setup
The experimental setup consists of a 500 liter vacuum chamber, various vacuum pumps,
vacuum gauges and a residual gas analyser (Fig. 1). The vacuum chamber is evacuated by a
300 l/s wide-range turbomolecular pump. For the experiments, different backing pumps have
been connected to the outlet of the turbomolecular pump. A manifold with several valves
allows the exchange of backing pumps without venting. The pressures in the high vacuum
chamber and in the fore-line were measured with capacitance vacuum gauges. The partial
ZPRAVODAJ C VS 10 (3-4), 2001
str.3
pressure of each gaseous component in the system was determined by a quadrupole mass
spectrometer. The mass filter ranges from 1 to 100 amu with a listed sensitivity of 2 x 10-4
Amps/torr. In this investigation, only relative mass variations are of interest. Therefore, no
correction factors were applied for the different ionization probabilities. The instrument was
interfaced with a desktop computer. Hydrogen (99.9 % pure) was supplied to the vacuum
chamber through a regulating valve.
Fig. 1: Experimental setup.
Fig. 2 shows the compression ratio of the used wide-range turbomolecular pump for nitrogen,
helium and hydrogen as a function of the backing pressure (taken from the manufactures data
sheet). The details depend on the design, size and so on of the actual pump. In applications,
where a low helium or hydrogen background and/or good high vacuum is required, it is
important to achieve the lowest possible backing pressure. The ultimate vacuum, which is
achievable in the vacuum chamber at zero gas flow, is given by the backing pressure divided
by the compression ratio. Therefore, assuming a constant compression ratio, the high vacuum
improves with decreasing backing pressure. Additionally, a lower backing pressure will lead
to an increase of the compression ratio. For example, in Fig. 2 the compression ratio for
hydrogen is about 1000 versus 500 000 at a backing pressure of 0.8 mbar or 0.2 mbar,
respectively. Hence, the compression ratio for hydrogen is improved by a factor of 500 if the
backing pressure is lowered from 0.8 mbar to 0.2 mbar. This results in a reduction of the
hydrogen background, which is in many cases the dominant fraction in the residual gas by
nearly three orders of magnitude. Also the ultimate vacuum is lowered correspondingly.
ZPRAVODAJ C VS 10 (3-4), 2001
1012
str.4
N2
1011
compression ratio
1010
109
108
He
107
106
H2
105
104
103 -4
10
10-3
10-2
10-1
100
101
backing pressure (mbar)
Fig. 2: Generalized, typical compression ratio of the used wide-range turbomolecular pump.
In many cases a high pumping speed of the backing pump is only required during evacuation
and high gas throughput cycles. Under high vacuum conditions the gas throughput is
extremely low and the pumping speed of the backing pump could be reduced accordingly.
Additionally, the backing pressure should be constant to avoid variations in the high vacuum.
This can be achieved with variable speed, i.e. rpm-controlled diaphragm pumps. The variable
speed motor allows rotational speeds between 0 % and 200 % of the nominal speed. An
integrated vacuum-controller measures and keeps the pressure in the fore-line constant by
adjusting the pumping speed of the variable speed diaphragm pump. During the pump down
cycle, the pumping speed is increased to its maximum value. At high vacuum operation, the
pumping speed is reduced accordingly. This not only results in a multiplication of the lifetime
of the diaphragms and valves but also in a very significant process and performance
advantage. Due to gas flow characteristics and the dynamics of the valves for pressures below
1 mbar, the ultimate vacuum of the diaphragm pump is rpm dependent (see Fig. 3). It is
therefore possible to investigate the influence of the backing pressure with one single pump
without changing the experimental conditions only by varying the pump rpms.
ZPRAVODAJ C VS 10 (3-4), 2001
Ultimate Pressure (relative change)
2.0
str.5
variable speed diaphragm pump
1.8
1.6
1.4
1.2
1.0
0.8
0.6
0.4
0.2
60 Hz
0.0
Rotational Frequency (Hz)
Fig. 3: Variation of ultimate pressure with rotational frequency of a low ultimate vacuum
diaphragm pump.
Results
Prior to the experiments, the vacuum chamber was evacuated and heated up to 80 ”C
over night. The residual gas spectrum after this treatment is shown in Fig. 4. The total
pressure is 3.6 x 10-7 mbar. The main component of the residual gas is water.
pressure (x 10-6 mbar)
10-1
10-2
10-3
10-4
mass (amu)
Fig. 4: Typical residual gas spectrum of 500 l vacuum chamber.
The 500 liter vacuum chamber, filled with 20 mbar hydrogen was evacuated by a
turbomolecular pump backed by a 4 stage diaphragm pump at a constant rpm of 50 Hz. After
the wide-range turbomolecular pump reached its operating speed the mass spectrometer was
turned on and data were recorded (see Fig. 5). The rpm-controlled diaphragm pump was first
run in constant rpm mode, then in “ Turbo-Mode°. The “ Turbo-Mode° maintains a preselected
vacuum level (choosable between 1 and 10 mbar) or adjusts automatically the rpm to reach
the lowest ultimate pressure (0.2 mbar) if the set value °loň is selected. In this experiment, the
ZPRAVODAJ C VS 10 (3-4), 2001
str.6
diaphragm pump was set into Turbo-Mode after 40 minutes and the pressure was regulated to
3, 2, 1 mbar and to the lowest pressure (0.2 mbar) after of 30, 15 and 15 minutes, respectively
(see Fig 5b). The partial pressures of all heavier masses continuously decrease with time.
Only molecular hydrogen (mass 2) shows a clear dependence on the backing pressure. The
hydrogen partial pressure seems to be limited by the compression ratio of the turbomolecular
pump.
3 mbar
3 mbar
10-6
2 mbar
backing pressure (mbar)
m = 18 water
m = 2 hydrogen
pressure (mbar)
2 mbar
1 mbar
-7
10
m = 28 nitrogen
10-8
10
1 mbar
0
lo
10-1
continuous
operation
at 50 Hz
lo
"Turbo-Mode"
m = 32 oxygen
10-2
-9
10
0
20 40 60 80 100 120 140 160 180 200
time (min)
a) b)
0
20 40 60 80 100 120 140 160 180 200
time (min)
Fig. 5: a) Time profile of residual gas components in a 500 l vacuum chamber after the
evacuation of 20 mbar hydrogen with 300 l/s wide-range turbomolecular pump and
four-stage diaphragm pump. b) Time profile of fore-line pressure in dependence of
operational characteristics of the backing pump.
Often it is argued that the hydrogen partial pressure is limited by the diaphragm pump.
It is assumed that the diaphragms may adsorb hydrogen in large amounts and desorp it later
on. In order to see if this effect can be observed, a second diaphragm pump, which has not
been exposed to hydrogen was hooked up to the manifold. In Fig. 6 the time profile of
hydrogen and water molecules are recorded while the diaphragm pump was switched from the
first to the second. The second diaphragm pump was connected to the turbomolecular pump in
the period between 50 and 90 minutes. The hydrogen partial pressure shows no change and
particularly no improvement. Hence, an assumed outgassing of diaphragms does not seem to
be the limiting factor for the hydrogen partial pressure.
10-6
pressure (mbar)
m = 18 water
-7
10
1st pump
2nd pump
1st pump
10-8
m = 28 nitrogen
m = 2 hydrogen
m = 32 oxygen
10-9
0
20
40
60
80
time (min)
100
120
140
Fig. 6: Time profile of residual gas
components in a 500 l vacuum
chamber. After 50 minutes a
second diaphragm pump was used
as a backing pump.
ZPRAVODAJ C VS 10 (3-4), 2001
str.7
Another interesting question is: Can the ultimate vacuum of the turbomolecular pumpe
be improved by backing pumps with a lower ultimate vacuum? Fig. 7 shows the time profile
of the residual gas in the 500 l vacuum chamber after the evacuation of 20 mbar hydrogen.
The backing pressure was varied with the rpm-controlled diaphragm pump. In addition, at 130
min a Roots pump was connected into the backing line between turbomolecular pump and
diaphragm pump, resulting in an ultimate pressure of 10-2 mbar. In spite, the backing pressure
thus was improved by a factor of 50 to 10-2 mbar, there is no visible improvement in the
observed gases. Hence, a lower backing pressure below 0.2 mbar does not improve the
ultimate vacuum anymore in the high vacuum range.
3 mbar 3 mbar
3 mbar
10-6
m = 18 water
m = 2 hydrogen
10-7
10
m = 28 nitrogen
-8
backing pressure (mbar)
partial pressure (mbar)
10-5
RP 15
(Roots pump
and MV 2)
100
10-1
lo
continuous
10-2 operation
MV2 Vario
at 50 Hz
lo
"Turbo-Mode"
MV 2 Vario at
3 mbar and lo
m = 32 oxygen
10-9
0
20 40 60 80 100 120 140 160 180 200 220
time (min)
10-3
0
lo
"Turbo-Mode"
MV 2 Vario at
3 mbar and lo
20 40 60 80 100 120 140 160 180 200 220
time (min)
Fig. 7: a) Time profile of residual gas components in a 500 l vacuum chamber.
b) Time profile of fore-line pressure in dependence of operational characteristics of the
backing pumps.
If the backing pressure is further reduced through the use of an oil-sealed rotary vane
pump, the residual gas also shows no further improvement. This can be seen in Fig. 8 where
the diaphragm pump was replaced by an oil-sealed rotary vane pump. This is probably due to
the fact, that no real well backed UHV-system is used. Data from turbomolecular pumps
manufacturers, show that in true UHV applications with diaphragm pumps an ultimate
vacuum of 10-8 mbar and with rotary vane pumps an ultimate vacuum of 10-10 mbar can be
achieved.
In all these cases where the high vacuum could not be improved by lowering the
backing pressure, it is apparent, that the partial pressures are limited by the ratio of system
outgassing to the pumping speed of the turbomolecular pump. The diaphragm pump - if it has
a low enough ultimate vacuum - is not the limiting factor.
The use of a Roots or a rotary vane pump with lower backing pressure has no effect on
the hydrogen partial pressure in comparison to a rmp controlled °Varioň diaphragm pump
operating in the °Turbo modeň. Therefore this type of diaphragm pump is an excellent choice
as a backing pump for turbomolecular pumps.
ZPRAVODAJ C VS 10 (3-4), 2001
str.8
partial pressure (mbar)
10-5
backing pressure
1 mbar
10-6
10-3 mbar
1 mbar
m = 18 water
10
-7
10-8
m = 28 nitrogen
m = 2 hydrogen
m = 32 oxygen
10-9
0
10
20
time (min)
30
40
50
Fig. 8: Time profile of residual gas
components in a 500 l vacuum chamber.
Between 20 and 30 minutes, the
diaphragm backing pump (backing
pressure: 1 mbar) was replaced by an
oil-sealed rotary vane pump (backing
pressure: 10-3 mbar).
Interpretation
The partial pressures of all observed mass lines in a good high vacuum system, except
for atomic and molecular hydrogen, continuously go down with pump time and level at a
constant value. In this case the partial pressures are mainly determined by the outgassing rate
of the vacuum chamber and the pumping speed of the turbomolecular pump. Further
reduction in backing pressure beyond 0,2 mbar does not bring any improvement. Only in the
case of hydrogen, where the compression ratio of the turbomolecular pump is relatively small,
the partial pressure in the high vacuum is significantly affected by the backing pressure.
Depending on the variation of the hydrogen compression ratio of the turbomolecular pump
with the backing pressure in the 10 to 0,2 mbar range, the hydrogen partial pressure drops
significantly with the backing pressure. Particularly there is a drastic improvement when
going from 2 bar to 0,2 bar. Changing to a backing pump with even lower ultimate pressure,
i.e. rotary vane or Roots-pump, has no further effect on the measured partial pressures.
Summary
The combination of diaphragm pumps with wide-range turbomolecular pumps
constitutes an outstanding high vacuum pumping system, which also shows advantages with
respect to price and ease of servicing compared to the conventional combination of rotary
vane and turbomolecular pumps. In general, the ultimate pressure in the high vacuum
chamber is basically limited by the ratio outgassing rate / pumping speed and not by
compression ratio / backing pressure. For hydrogen, where the compression ratio is relatively
small, the hydrogen partial pressure can be improved by choosing a diaphragm pump with
lowest attainable ultimate vacuum.
ZPRAVODAJ C VS 10 (3-4), 2001
str.9
Nekolik zajı
mavostıze sortimentu firmy LEYBOLD
Firma LEYBOLD je tradic nı
m dodavatelem vyrobku vakuová
techniky v sirokám sortimentu, vyvev, mericı
ch prı
stroju, hledac u
netesnostı
, fitinku a ventilu. Protoz e nenımoz ná ani –c elná zabyvat se
v kratkám prı
spevku tak sirokym spektrem, omezı
me se
v nasledujı
cı
m na tri skupiny produktu, která by mohly zaujmout
principem, urc enı
m nebo cenou.
Prvnıje skupina vyvev ECODRY. Asi pred 20 lety zahajili
vyrobci odhodlaná taz enıs cı
lem zı
skat bezolejovy c erpacısystám, ktery by byl parametry
plne srovnatelny se stojany pouz ı
vajı
cı
mi jako primarnırotac nıolejovou vyvevu (ROV).
V ROV olej krome dalsı
ch –kolu maz e troucıse c asti. S tı
m se v bezolejovych vyvevach dalo
vyporadat dvema cestami : konstrukcıpreciznı
ch soustrojıs rotory sloz itych geometrickych
tvaru, která mezi sebou udrz ujıpri rotaci minimalnımezeru, ale nejsou v kontaktu nebo
technologicky volbou materialu oteruvzdornych a schopnych odvást vznikajı
cıteplo. V
tuzemci, ktery zı
skal bezprostrednıcit pro material hrou s drevenymi kostkami, stavebnicı
Merkur, opravami kolobez ky, bicyklu a automobilu, vyvola druha cesta dojem niz sı
z ivotnosti, ale to ponekud podcenuje modernımaterialy. Uz itı
m hlinı
kovych slitin, povlaku
polytetrafluoretylenu, fluorkarbonováho kauc uku a nerezi bylo dosaz eno mezi–drz bováho
intervalu 2 roky pri prakticky nepretrz itám provozu, samozrejme pri c erpanıneagresivnı
ch
latek. Firma Leybold dodava vyvevy rady EcoDry M o c erpacı
ch rychlostech 15, 20 a 30 a
EcoDry L s c erpacırychlostı40 m3/h, která ve trıa c tyrstupnovám usporadanıdosahujı
meznı
ho tlaku radu Pa, ve dvojstupnovám desı
tek Pa. Hmotnostıjsou srovnatelná
s odpovı
dajı
cı
mi rotac nı
mi olejovymi vyvevami, lze je provozovat poloz ená na bok, aniz by
cokoliv vyteklo. Co je vsak mimoradne prı
znivá, je porovnanıcen. Vyjdeme-li z cen
odpovı
dajı
cı
ch dvoustupnovych ROV, je cena vyvev rady EcoDry M jen o nekolik desı
tek %
vyssı
, zatı
mco u vyvev s komplikovanymi rotory, jaká napr. v sortimentu Leybold
reprezentuje nynıdvouproudá sroubová c erpadlo DuraDry, je vesmes znatelne vyssı
.
Vzhledem k dostupnosti turbomolekularnı
ch vyvev s molekularnı
m stupnem je to tedy
ekonomicky prijatelna cesta k bezolejovámu c erpacı
mu systámu.
Druhou skupinou vyrobku jsou kapacitnıtransmitery CTR 90 / 91. Uz ivatelá vakuová
techniky si uz na kapacitnımerky zvykli a moz nost odlisit signal vyvolany nepatrnymi silami
zredenáho plynu od tepelnych dilatacıa dalsı
ch sumu jim pripada samozrejma. Definitivnı
m
resenı
m tohoto problámu je termostatizace merky na nekolik desı
tek ”C, napr. 45 ”C, jako je
tomu u rady termostatizovanych transmiteru LEYBOLD CTR 91. Za toto resenıje ovsem
nutno zaplatit jistou cenu, a to nejen financ nı
. Aby bylo moz no vyuz ı
t plne zı
skaná presnosti a
citlivosti, je nutno nechat jakoukoli termostatizovanou merku nejprve spolehlive prohrat na
urc enou teplotu, coz vyz aduje nekolik hodin. Termostatizacına zvysená teplote vytvarı
me
cı
tankovou ukazku fyzikalnı
ho systámu, kde se uplatnıtepelna transpirace plynu, kterou je
nutno korigovat.
S vlivem teploty na presnost mericı
ho prı
stroje se utkaval c lovek od nejzazsı
ch poc atku
merenıa je zajı
mavá sledovat mnohdy genialne prostá myslenky z dob, kdy jeste nebylo
ZPRAVODAJ C VS 10 (3-4), 2001
str.10
moz no napechovat merak mikroelektronikou, aby se s tı
m nejak vyporadala. U rady starych
kyvadlovych hodin je pozoruhodna konstrukce kyvadla. C oc ková zavaz ınenıpripevneno
prı
mo na konci hlavnıtyc e, ale na kratká tyc ce, smerujı
cıod konce hlavnıtyc e zpet
k hodinam. Ma-li zpetna tyc inka tolikrat vetsıtepelnou roztaz nost, kolikrat je kratsı
,
kompenzujıse pri zmenach teploty dilatace tyc ıa hodiny jsou presnejsınez s jednoduchym
kyvadlem. Myslenky kompenzace vyuz ı
va firma Leybold u rady teplotne kompenzovanych
transmiteru LEYBOLD CTR 90. Dokonala kompenzace je samozrejme obtı
z nejsınez
termostatizace, proto rada kompenzovanych transmiteru konc ınejcitlivejsımerkou
s rozsahem 1 torr, zatı
mco rada termostatizovanych transmiteru 0,1 torr, presto v mnoha
aplikacı
ch je vhodná jejich vyhody uvaz it.
Poslednıskupinou zajı
mavych produktu firmy LEYBOLD, o která se chceme zmı
nit, je
nove uvadena moz nost propojenımenic u turbomolekularnı
ch vyvev s poc ı
tac em pres
rozsı
rena standardnırozhranı
. To umoz nuje napr. poc ı
tac em nebo malym kontrolerem palm
obsluhovat elektroniku menic e a naopak sledovat prubeh c erpanıa zatı
z enıvyvev podle
velic in na menic i. U vyvev s mechanickymi loz isky lze pomocıspecialnı
ho software rı
dit
otac ky vyvevy v sirokám rozsahu, podle typu az 1:2. Uvaz ı
me-li, z e turbomolekularnıvyveva
je dnes elektronicky stabilizovany setrvac nı
k, nabı
zıse tı
m zajı
mava moz nost regulace
c erpacırychlosti, coz muz e nabı
dnout nova resenınekterych problámu.
Zastoupenıfirmy Leybold pro C R a SR najdete na adrese :
AQUA Chemie spol. s r. o.
C eskomoravska 21
190 00 Praha 9
tel. +420 +2 6603 8939, - 8940
fax +420 +2 6603 8941
e-mail: [email protected]
Servis vyrobku firmy Leybold pak na adrese :
Servis FINN Š LEY s. r. o.
Sima c kova 2
628 00 Brno
tel. +420 +5 4421 1339
fax+tel. +420 +5 4421 3230
e-mail: [email protected]
ZPRAVODAJ C VS 10 (3-4), 2001
str.11
Novinky roku 2001 firmy Pfeiffer Vacuum
Dr. Ing. R. Salomonovic , Doc. Ing. Z. Hulek, CSc.
Na letosnıvystave PRAGOVAC prezentovala firma Pfeiffer Vacuum nekolik novinek,
která se objevujıv sortimentu firmy v letosnı
m roce. Nová produkty spadajıdo nekolika
ruznych oboru a doplnujıjejich jiz zavedená bohatá spektrum komponent a technologiı
.
Pro prumyslová aplikace v oboru hrubáho vakua byla uvedena kompletnırada c erpacı
ch
stojanu PackageLine. Jde o kombinaci jednostupnovych rotac nı
ch vyvev a Rootsovych
vyvev s celkovou c erpacırychlostıod 235 do 5500 m3 za hodinu. Rotac nıvyvevy majı
integrovany vystupnıfiltr olejovych par s recyklacıa bezpec nostnıventil. Pouz itıtechto
systámu se nabı
zıv metalurgii, balı
cı
m prumyslu, jako predvakuová stojany nebo pro c erpanı
vakuovych vpustı
.
V oblasti suchych vyvev prichazı
firma Pfeiffer Vacuum s novym
konceptem OnTool DryPump. Jde o
novy prı
stup v resenıumı
stenıvyvev
prı
mo u vyrobnı
ho zarı
zenıoproti
klasickámu pojetıs c erpacı
mi stojany
stojı
cı
mi mimo vlastnıprovoznı
zarı
zenıa pripojenymi dlouhym
prı
vodnı
m potrubı
m. Novym
poz adavkum odpovı
dajıparametry:
malá rozmery pri relativne vysoká
c erpacırychlosti, nı
zka hluc nost a
vibrace, nı
zká naklady na pripojovacı
vakuová potrubı
, promenná otac ky a
tı
m i ovladatelna promenna c erpacırychlost. Samozrejmostıje bezolejová provedenı
, bez
dynamickych tesnenıa tedy s velmi nı
zkymi provoznı
mi a –drz bovymi naklady.
Segment turbomolekularnı
ch vyvev je
doplnen predevsı
m novou “ vlajkovou lodı
° TPH
2101 s integrovanou rı
dı
cıjednotkou. Tato vyveva s
velmi prı
znivym pomerem vykon/cena je urc ena
vzhledem ke svá vysoká c erpacırychlosti pro
aplikace v polovodic ovám prumyslu, ve vyzkumu a
vyvoji a obecne pro vysokovakuová procesy.
Sortiment turbomolekularnı
ch vyvev je
rozsı
ren i na opac ná strane skaly. Malá modely TPD
011, TMH(U) 071 a TMH(U) 261 s napajenı
m 24
V jsou zamereny predevsı
m na OEM zakaznı
ky.
ZPRAVODAJ C VS 10 (3-4), 2001
str.12
Na poli malych c erpacı
ch stojanu
s turbomolekularnı
mi vyvevami je nynıv nabı
dce
Pfeiffer Vacuum stojan TSH(U) 071 E (Economy),
ktery zaujme predevsı
m akademicky sektor trhu a
OEM zakaznı
ky. Jeho primarnıdevizou je, jak jiz
nazev napovı
da, cena.
Poslednınovinkou
predstavenou na prezentaci Pfeiffer Vacuum jsou kapacitnıvakuová
senzory rady CCR. Jde merky s keramickou membranou a vysokou
mechanickou a teplotnıstabilitou. Prednostıtáto rady je interface
plne kompatibilnıs vetsinou dnes pouz ı
vanych zarı
zenı
v polovodic ovám prumyslu.
Na zaver prezentace byly oznameny taká zmeny telefonnı
ho
cı
sla Praz ská poboc ky Pfeiffer Vacuum a zmenu nazvu servisnı
organizace Servis Balzers na Vakuum Servis. Pro nase c tenare a
zakaznı
ky Pfeiffer Vacuum uvadı
me tyto zmeny i zde:
Pfeiffer Vacuum
Poboc ka Praha pro C R a SR
Zvonarska 885
156 00 Praha 5
Tel. +420 2 57 92 38 88
fax +420 2 579 230 14
E-mail: [email protected]
[email protected]
[email protected]
URL http://www.pfeiffer-vacuum.at
Jir ıKuba n Š VAKUUM SERVIS
Ul. Hasic ska 2643
756 61 Roz nov p. Radhostem
tel. 0651 602314
fax 0651 603166
E-mail: [email protected]
URl http://www.vakuum-servis.cz
ZPRAVODAJ C VS 10 (3-4), 2001
str.13
Pr edstavujeme firmy
Pro zlepsenı informovanosti i tech c lenu C VS, kterı se nez–c astnili seminare
PRAGOVAC, se vybor C VS rozhodl zverejnovat ve Zpravodaji profily firem, jejichz aktivity
se tykajıvakuová techniky a technologie a která o to projevızajem. V tomto c ı
sle prinası
me
prvnıdoslá prı
spevky.
FERROTEC GmbH
Hohes Gestade 14
72622 N¨rtingen
GERMANY
phone: +49 7022 9270 0
fax: +49 7022 9270 10
http://www.ferrotec.com
ISO 9002 Certified
Products:
Polycold cryo generators, meissner traps, AP&T electron beam evaporators and power
supplies, Ferrofluidicš vacuum feedthroughs, full installation and repair service and support.
POLYCOLDš cryo generators are synonym for increased productivity in a wide range
of vacuum coating applications. Using POLYCOLDš ’s patented cryogenic refrigeration
process the cryo pump works on the Meissner trapping principle. Coils can be customized
according to customer’s needs.
POLYCOLDš ’s benefits are primarily improved quality, reduced pump down time and
an increased product throughput leading to short term return of investment.
Benefits:
Increased throughput by +20% to +100%
Reduces pump-down time by -25% to -75%
Better quality of produced layers
Technical data:
Fast cool down and warm up
Cooling capacity up to 3600 W
Temperatures down to -150”C
ZPRAVODAJ C VS 10 (3-4), 2001
str.14
E-beam evaporators:
Developed and manufactured in Germany, Ferrotec electron beam products have a
reputation worldwide for being at the leading edge of electron beam technology. Ferrotec’s
global organization provides local customer service and comprehensive technical support.
Ferrotec offers single and multi-hearth evaporators, power supplies and controllers for a
wide range of applications including semiconductor, thin film and optical coating.
A Ferrofluidicš seal takes advantage of the response of a magnetic fluid to an applied
magnetic field. The basic seal components include ferrofluid, a permanent magnet, two pole
pieces and a magnetically permeable shaft. The magnetic circuit, completed by the stationary
pole pieces and the rotating shaft, concentrates magnetic flux in the radial gap under each pole
piece. When fluid is applied to this gap it assumes the shape of a liquid O-ring and produces a
hermetic seal. Ferrofluidic vacuum rotary feedthroughs utilize multiple rings of ferrofluid
contained in stages formed by grooves machined into either the shaft or pole pieces. Typically
a single stage can sustain a pressure differential of 200 mbar. The pressure capacity of the
entire feedthrough is approximately equal to the sum of the pressure capacities of the
individual stages.
ZPRAVODAJ C VS 10 (3-4), 2001
str.15
Telefon: +420 5 47220936, 47220760
Na zev firmy: TESCAN, s.r.o.
Fax:
+420 5 47220936, 47220016
Adresa:
Libusina tr. 21
http:
www.tescan.cz
623 00 BRNO
C eska republika
Kontaktnıosoba: Jaroslav Klı
ma, jednatel, [email protected]
Tescan,s.r.o. je c eska firma vyrabejı
cıvedecká prı
stroje a laboratornızarı
zenı
. Nosnymi
vyrobky jsou rastrovacıelektronová mikroskopy, jejich moduly a prı
slusenstvı
.
Rastrovacıelektronová mikroskopy VEGA, která firma v souc asnosti vyrabıse
vyznac ujıvynikajı
cı
mi elektronove-optickymi vlastnostmi, jsou plne automatizovaná a rı
zená
poc ı
tac em. Poskytujıuz ivateli vysoky stupen komfortu, zahrnujı
cıautomatická nastavovanı
mikroskopu, jakoz i systám pro zpracovanı
, vyhodnocovanıa archivaci snı
mku. Jsou
prı
kladem dokonalá symbiozy presná strojnıvyroby, modernıelektroniky a sofistikovanáho
programováho vybavenı
.
Projekt VEGA zı
skal zvlastnıocenenıInz enyrská akademie C eská republiky za
mimoradná technická dı
lo. Rastrovacıelektronovy mikroskop VEGA byl taká na
Mezinarodnı
m strojı
renskám veletrhu 2001 ocenen zlatou medailı
.
Za kladnıtechnicků parametry mikroskopu VEGA
Rozlisenı
:
3,5 nm
Zvetsenı
:
15x az 500 000x
Urychlovacınapetı
:
500 V az 30 kV
ZPRAVODAJ C VS 10 (3-4), 2001
str.16
Moznosti kalibracımer idel vakua v C R
V poslednı
ch letech smeruje nemaly objem zahranic nı
ch investic do podniku uz ı
vajı
cı
ch
vakuovou techniku a s vakuovou technikou ma co do c inenıi stale vı
ce domacı
ch firem.
Protoz e jde vetsinou o vyroby, kde se certifikace podle norem rady ISO 9000 stava
nezbytnostı
, je jednı
m z predpokladu tohoto rozvoje dostupnost kalibrace meridel.
S uspokojenı
m je nutno konstatovat, z e od nulováho bodu, ktery nastal v momentu rozdelenı
federace, byl na tomto poli vykonan velky kus prace, takz e v C R je dostupna jiz velka c ast
metrologickych sluz eb na –rovni srovnatelná s renomovanym zahranic ı
m. Prinası
me kontakty
a zakladnıinformaci o oddelenıprimarnımetrologie vakua, kam se lze s potrebou techto
sluz eb obracet.
C MI - OBLASTNI INSPEKTORA T BRNO
613 - Oddelenıprima rnımetrologie tlaku
Okruz nı31, 638 00 BRNO
http://www.cmi.cz
tel: (05) 4522 27 27
fax: (05) 4522 21 83
Mgr. JirıTesar
Ing. Zdenek Krajı
c ek
Ing. Frantisek Stanek
Mgr. Dominik Praz ak
[email protected]
[email protected]
[email protected]
[email protected]
Novů sluzby str ediska:
V nedavná dobe oddelenırozsı
rilo svá sluz by v oblasti poskytovanıkalibracıv oboru
vakua do rozsahu 10-7 Pa dı
ky novym ionizac nı
m vakuometrum (navaznost na PTB). Zcela
nove byla zavedena kalibrace etalonu háliová netesnosti v rozsahu 10-9 az 10-3 Pa.m3.s-1
(navaznost na PTB).
Dale bylo dosaz eno snı
z enınejistot u etalonaz e maláho hmotnostnı
ho prutoku plynu
dı
ky porovnanıs NRML (Japonsko), Metas (Svycarsko) a PTB (Nemecko).
Na vaznost
Souc asná navazanıjednotky tlaku ve vakuu se odvı
jıod pı
stováho etalonu tlaku PG
7601, jehoz tlakova merka bala geometricky vyhodnocena a nasledne porovnana s
vynikajı
cı
mi vysledky napr. s etalony PTB v Nemecku c i NMI v Holandsku. V letosnı
m roce
byl tento etalon vyhlasen statnı
m etalonem C R.
Nejlepsıschopnosti kalibrace a mer enı
:
Nejlepsıschopnosti kalibrace a merenıjsou udany jako rozsı
rena kombinovana nejistota
pro –roven pravdepodobnosti pokrytı95 %
ZPRAVODAJ C VS 10 (3-4), 2001
mer ena velic ina
nebo pr ı
stroj
Absolutnıtlak
rozsah kalibrace
10-5 az 10-7 Pa
str.17
Nejlepsıschopnosti
kalibrace a mer enı
(8 az 12)%
dle rozsahu
(1,5 az 2,5)% dle
rozsahu
(0,1 az 0,2)%
dle rozsahu
0,5 Pa + 12 ppm
identifikace metody,
pozna mky
Ionizac nıvakuometry
Absolutnıtlak
100 az 10-4 Pa
Absolutnıtlak
103 az 100 Pa
Absolutnıtlak
5 kPa az 7 MPa
Pretlak - plyn
1 Pa az 3,2 kPa
0,02 Pa + 80 ppm
Pretlak - plyn
3,2 kPa az 5 kPa
20 ppm
DHI PG 7102
Pretlak - plyn
5 kPa az 10 MPa
0,2 Pa + 10 ppm
DHI PG 7601
Podtlak - plyn
1 Pa az 3,2 kPa
0,02 Pa + 80 ppm
FRS 4
Podtlak - plyn
5 kPa az 100 kPa
1 Pa + 12 ppm
DHI PG 7601
Pretlak - kapalina
10 kPa az 500 MPa
DHI PG 7302
Pretlak - kapalina
500 MPa az 1 GPa
(23 az 120) ppm dle
rozsahu
0,2 %
Diferenc nıtlak
0,1 kPa az 1 MPa
1 Pa + 50 ppm
1 az 30 000 n cm3/min
(0,15 az 0,3) % dle
rozsahu
(3 - 8)% dle rozsahu
Maly hmotnostnı
prutok
Heliová netesnosti
Hustota plynu
10-9 - 10-3 Pa m3 s-1
0,5 az 100 kg/m3
(0,1 az 0,25) % dle
rozsahu
Viskosnıvakuometr
Staticka expanze
DHI PG 7601
FRS 4
AMSLER 10 000
Divider
Molbloc/Molbox
Prisma
Primarnıaparatura
V oboru vakua jsou v souc asnů dobe poskytova ny kalibrace:
•
Piraniho vakuometru
•
Penningovych vakuometru
•
kapacitnı
ch vakuometru
•
kapalinovych vakuometru
•
deformac nı
ch vakuometru
•
ionizac nı
ch vakuometru
•
termoc lankovych vakuometru
•
piezoelektrickych vakuometru
•
rezonanc nı
ch vakuometru
Bliz sıinformace vc etne aktualnı
ch cen kalibracıjsou uvedeny na internetovych strankach
C MI na adrese www.cmi.cz .
ZPRAVODAJ C VS 10 (3-4), 2001
str.18
C SN tykajı
cıse vakuovů techniky
vyber proveden podle URL http://www.csni.cz/ORDERS/vyber.asp.
C SN 01 1326
Velic iny a jednotky ve vakuová technice
C SN 01 3621
Poz adavky na kreslenıvakuovych schámat
C SN 01 3622
Znac ky pro schámata. Stavebnıprvky vakuovych zarı
zenı
C SN 10 7001
Nazvoslovıve vakuová technice
C SN 10 7002
Vakuova zarı
zenı
. Klasifikace
C SN 10 7005
Znac ky pro kreslenıschámat vakuovych zarı
zenı
C SN 10 7015
Vakuová zarı
zenı
. Jmenovitá svetlosti Js
C SN 10 7220
Vakuová prı
rubová spoje. Druhy a zakladnırozmery
C SN 10 7221
Vakuova zarı
zenı
. Prı
ruby pro vakuová spoje
C SN 10 7222
Vakuova zarı
zenı
. Prı
ruby otoc ná pro vakuová spoje
C SN 10 7224
Distanc nıkrouz ky pro vakuová spoje
C SN 10 7226
Sverky pro vakuová spoje s prı
rubovymi nakruz ky
C SN 10 7228
C SN 10 7229
Vakuová zarı
zenı
. Prı
rubová spoje pro ultravakuová systámy.
Konstrukce, rozmery a technická poz adavky .
Vakuová zarı
zenı
. Spoje ultravakuovych potrubı
. Montaz nırozmery
C SN 10 7233
Vakuová zarı
zenı
. Ventily vakuová prı
má a rohová. Montaz nırozmery
C SN 10 7234
Vakuová zarı
zenı
. Spoje vakuovych potrubı
. Montaz nırozmery
C SN 10 7235
Vakuova zarı
zenı
. Upı
nacıtrmenová rychlospoje pro obory hrubáho,
jemnáho a vysokáho vakua ,
Vakuova zarı
zenı
. Pryz ová tesnicıkrouz ky
C SN 10 7255
C SN 25 7072
C SN 25 7207
C SN 25 7214
C SN 25 7215
C SN 25 7216
C SN 35 8571
Tlakomery. Pruz ná tlakomerná prvky manometrov, manovakuometrov a
vakuometrov. Vseobecná technická poz iadavky a metody sk–sok ,
Manometre, manovakuometre a vakuometre indikac ná. Metody
sk–sania pri –radnom overovanı,
Etalonová deformac ná manometre a vakuometre. Technická poz iadavky
Metrologia. Manometre, vakuometre deformac ná. Sekundarne etalony.
Metody sk–sania pre –radná overovanie ,
Kontaktná manometre a vakuometre. Metody sk–sania pre –radná
overovanie
Obrazovky. Metody stanovenıc initele vakua
C SN EN ISO 1741 Dextroza. Stanovenıztraty hmotnosti susenı
m. Metoda vakuová susarny
(ISO 1741:1980)
C SN EN 1251-1
Kryogenická nadoby - Prepravnıvakuove izolovaná nadoby s objemem
do 1000 litru vc etne - C ast 1: Zakladnıpoz adavky
C SN EN 1251-2
Kryogenická nadoby - Prepravnıvakuove izolovaná nadoby s objemem
do 1000 litru vc etne - C ast 2: Konstrukce, vyroba, kontrola a zkousenı
ZPRAVODAJ C VS 10 (3-4), 2001
C SN EN 1251-3
C SN 70 0577
C SN 70 2104
C SN EN ISO
10079-3
C SN EN 12546-1
str.19
Kryogenická nadoby - Prepravnıvakuove izolovaná nadoby s objemem
do 1000 litru vc etne - C ast 3: Provoznıpoz adavky
Sklo. Zkousenınetesnosti sklenenych vakuovych zabrusu
Skla pre vakuov– techniku. Banky na svetelná zdroje. Spoloc ná
ustanovenia
Zdravotnicka odsavacızarı
zenı- C ast 3: Odsavacızarı
zenıpohanena
vakuovym nebo tlakovym zdrojem
Materialy a predmety pro styk s potravinami - Tepelne izolac nınadoby
pro uz itıv domacnosti - C ast 1: Specifikace pro vakuová nadobı
, tepelne
izolac nılahve a konvice ,
V prvnı
m letosnı
m cı
sle Zpravodaje C VS vyvolal zaslouz eny ohlas prvnıdı
l vzpomı
nek
p. prof. Libora Patáho na vyvoj vakuová techniky u nas. Dnes tedy prinası
me dı
l druhy a
prejeme autorovi, aby se mohl tesit dobrámu zdravıa prinást nam jeste nejednu vzpomı
nku
na zac atky oboru, ve kterám se dnes angaz ujeme.
Vakuova technika v pova lec nych letech II.
Vzpomı
na Libor Paty
V poslednıvzpomı
nce jsme zmı
nili zrod nekterych institucı„ –stavu, laboratorıa
kateder, která mely ve svych zamerech do vetsıc i mensımı
ry rozvı
jenıvakuová techniky a
v dalsı
ch letech tyto zamery i naplnovaly. Ze zavodu “ Tesla Elektronik° se vyvinul
Vyzkumny –stav pro vakuovou elektrotechniku „ VUVET. (Urc itou dobu nesl nazev
rozsı
reny o “ ť a technologii souc astek° - VUVETS.) Dostal v pozdejsıdobe k dispozici i
areal zamec ku a prilehlych provozoven na Jeneralce. Jeden ze sektoru tohoto –stavu se
zabyval prevaz ne vakuovou technikou a pracovaly v nem „ jak se pozdeji ukazalo celoz ivotne
„ taková osobnosti, jako byli bratri Hixová a J. Neumann.
Zvlastnıvyznam pro vakuovou techniku mela brnenska Laborator elektronová optiky
vedena Ing. Zdenkem Burı
valem. Konstrukci vakuová c asti stolnı
ho elektronováho
mikroskopu provedl Ing. Ladislav Zobac , ktery mel tehdy jiz znac ná zkusenosti v oboru
vakuovych aparatur. Pri nemalych –kolech, kladenych na nej jako na konstruktára, nalezl c as
na to, aby sepsal prvnıc eskou prı
ruc ku “ Zaklady vakuová techniky°, jez byla pak po dlouha
láta oporou techniku a posluchac u pri studiu.
K prave zmı
nenámu pracovisti akademie je nutno pripojit i druhá „ Ustav fyzikalnı
chemie v Praze (tehdy v Machove ulici), vedeny prof. Rudolfem Brdic kou. Jedna ze skupin
tohoto –stavu se venovala konstrukci prvnı
ho naseho hmotováho (dnes “ hmotnostnı
ho°)
spektrometru. Pri táto praci si konstruktári osvojili a rozvinuli modernıvakuovou metodiku.
Snad stojıza pripomenutı
, z e jak “ Stolnıelektronovy mikroskop°, tak “ Hmotovy
spektrometr° byl tehdy ocenen vyznamnymi cenami a tato ocenenıimplicitne potvrzovala
vyznam vakuová techniky.
ZPRAVODAJ C VS 10 (3-4), 2001
str.20
Vzajemny styk mezi odbornı
ky z jednotlivych pracovis vakuová techniky byl
v padesatych letech jen sporadicky. V jinych oborech tomu bylo ostatne nejinak. Prı
c in toho
bylo povı
cero: Tehdejsırez im predepisoval ruzná stupne utajenıa pracovnı
ci se obavali o
svych pracovnı
ch problámech mimo pracoviste hovorit, aby to nebylo kvalifikovano jako
vyzrazenıvyrobnı
ho tajemstvı
. Dale prevaz na vetsina pracovnı
ku byli mladızac atec nı
ci, kterı
nebyli vedeni zkusenejsı
mi, starsı
mi predstavenymi a neznali cenu vzajemná komunikace
mezi kolegy. Z dnesnı
ho pohledu je proto nutno ocenit myslenku, ktera se zrodila na
matematicko-fyzikalnıfakulte Karlovy univerzity, katedre vysoká frekvence a vakuová
techniky, zrı
dit pravidelny seminar vysoká frekvence a vakuová techniky, na nejz byli zvani
k prednesenıinformace o vlastnıpraci odbornı
ci z ruznych pracovis . Tento seminar postupne
lamal bariery mezi pracovisti a umoz noval diskusi o problámech vakuová techniky a otevı
ral i
cestu k tehdy vzacnym zpravam o stavu oboru v zahranic ı
. C as od c asu na seminari prednaseli
i navstevy „ hostá - nejc asteji akademie „ ze zahranic ı
. Seminar byl po dlouha láta hojne
navstevovan a bylo by jiste pro zajemce o historii oboru zajı
mavá se blı
z e seznamit s obsahem
seminaru. V ramci techto vzpomı
nek to prirozene nenımoz ná, lze vsak odkazat na “ Pametnı
knihu KEVF°, v nı
z jsou tyto informace systematicky a presne zaznamenany.
Alpertovy prace z poloviny padesatych let vzbudily i u nas pozornost, ktera vy–stila ve
snahu konstruovat ultravakuovou aparaturu. Problámu zde bylo mnoho: vhodny ionizac nı
vakuometr, ultravakuova vyveva, spolehlivy ventil pracujı
cıdokonale tesne a bez vakuováho
mazu a samozrejme odplynitelny pri teplotach pres 400 ”C a konec ne materialová problámy
jako vhodná tvrdá sklo (sklo Pyrex u nas bylo tehdy nedostupná a pouz ı
vaná molybdenová
sklo nemuselo byt dostatec ne neprostupná pro nekterá plyny okolnıatmosfáry. Na katedre
vysoká frekvence a vakuová techniky byl v tá dobe konstruovan ionizac nıvakuometr pro
potreby praktika pro posluchac e c tvrtáho roc nı
ku. Tento vakuometr mel dobre odplynitelnou
mrı
z ku z molybdenováho dratu a v jeho ose byl vlaknovy kolektor tak, jak popsali Bayard a
Alpert. Chybel vsak celokovovy ventil s izolujı
cıkovovou membranou a na jeho konstrukci
bez svarec ky s elektronovym svazkem nebylo ani pomyslenı
. Autor techto vzpomı
nek prisel
s myslenkou konstruovat mı
sto ventilu uzaver na principu rtu ováho uzaveru se sklenenou
trubicı
, v nemz by bylo mı
sto rtuti pouz ito india, kovu tajı
cı
ho pri zahratıolejovou laznı
.
Konstrukce tzv. indiováho ventilu se osvedc ila a v roce 1957 bylo na sklenená aparature
s tı
mto ventilem a ionizac nı
m vakuometrem dosaz eno ultravakua. To bylo silnym impulzem
pro praci s ultravakuem i na ostatnı
ch pracovistı
ch, zejmána ve Vyzkumnám –stavu pro
vakuovou elektrotechniku.
Koncem padesatych let prisla doc. Ludmila Eckertova z KEVF (katedra vysoká
frekvence a vakuová techniky zmenila svuj nazev na katedru elektroniky a vakuová fyziky)
s navrhem usporadat celostatnıkonferenci o elektronice a vakuová fyzice. Navrh se opı
ral o
zkusenosti se seminari, která prokazaly, z e na nasich pracovistı
ch existuje dostatek vedeckych
a vyvojovych vysledku, která by snadno naplnily i vı
cedennıkonferenci. Byl sestaven
organizac nıvybor za predsednictvıdoc. Eckertová, ktery sestavil koncepci konference a
postaral se o nezbytná hmotná zajistenı
. Spoluporadateli byla Jednota c s. matematiku a fyziku
a Vyzkumny –stav pro vakuovou elektrotechniku. Odezva na ohlasenıkonference byla nad
vsechna oc ekavanı„ prihlasilo se pres dve ste –c astnı
ku a ohlaseno bylo 80 prednasek.
Konference probehla v roce 1960 v Narodnı
m klubu Na Prı
kope. Konferenci zahajil ministr
skolstvıa –vodnıprednasky prednesli Ing. J. Vana o vyvoji nasıelektroniky, L Pekarek o
ionizac nı
ch jevech v plynech a L. Paty o souc asnám stavu fyziky nı
zkych tlaku. Jedna ze sesti
sekcıkonference byla venovana vakuová fyzice a technice. Konference znamenala velky
–spech a byla vyuz ita i k prijetırezoluce, v nı
z byly z adany statnıorgany o podporu vedy,
ZPRAVODAJ C VS 10 (3-4), 2001
str.21
vyzkumu a vyvoje v elektronice a vakuová technice. Rezoluce doporuc ila po dvou letech
usporadat konferenci dalsı
. Z konference byl vydan sbornı
k jako dvojc ı
slo C s. c asopisu pro
fyziku A. Zasadnı
m vysledkem konference bylo to, z e se na nıosobne poznali odbornı
ci
z ruznych pracovis , vymenili si zkusenosti a v mnoha prı
padech navazali spolupraci.
Kalrez
Pavel Drasar, SciTech s.r.o., Praha
Synonyma FFKM, TSE, alternativa Zalakš . Kalrez je razen mezi fluoropolymery TS,
termosety, elastomery TS a nekdy i pryz e. Je to mimoradny perfluoroelastomerovy
kompozitnımaterial s vysokou chemickou odolnostıa velmi dobrymi mechanickymi
vlastnostmi. Jde o intelektualnıvlastnictvıa produkt spolec nosti DuPont Dow.
Spojuje ve svych vlastnostech kvality fluoroelastomeru Vitonu s chemickou odolnostı
fluoropolymeru Teflonu. Hodıse vsude tam, kde je vyz adovana spolehliva a dlouhodoba
funkce a kde na prı
slusny prvek pusobıagresivnıchemikalie a teplo. Je prokazana odolnost
vuc i vı
ce nez 1600 chemikaliı
m a za teplot az do 316 ”C (kratkodobe i vyssı
). V celám
rozsahu pouz itısi zachovava svoje elastická, chemická vlastnosti a tepelnou odolnost. Zvlaste
je vhodny pro pouz itıv c istych prostredı
ch citlivych na jakoukoliv kontaminaci.
Kalrez je odolny i vuc i botnanı
, tak naprı
klad sestimesı
c nıpusobenısmesi
methylethylketonu, toluenu a dichlormethanu zanechala Kalrezová O-krouz ky “ nedotc ená°
zatı
mco klasická, pryz ová byly silne nabotnalá. Nejbez nejsıkompozit je StandardnıKalrez
4079 pro obecná pouz itıse nedoporuc uje se napr. u horká vodnıpary, horkych alifatickych
aminu, ethylenoxidu a proylenoxidu. Pro paru a aminy se naopak hodıKalrez 1050LF. Vodnı
pare vzdoruje dobre taká sazemi plneny Kalrez 1018, nadruhá strane nevhodny pro pouz itıu
organickych i anorganickych kyselin. Nejplastic tejsıKalrez 1058, plastifikovany
perfluorovanym olejem je nejmekc ız celá rodiny Kalrezu, je podobne odolny jako Kalrez
1058 s tı
m, z e pri vyrobe se mohou menit jeho rozmery, pouz ı
va se na tesnenınaprı
klad u
vysokotlaká chromatografie. Kalrezy trı
dy Ultrapure jsou baleny v dvojitych obalech
v prostredıtrı
dy (Class) 100 pro pouz itıv extráme c istám prostredı
. Bı
ly Kalrez 2037 se
pouz ı
va v oxidac nı
m a kyselám prostredı
.
Tesnı
cıa elastická vlastnosti, testovaná podle normy ISO 334 ukazaly jeho naprostou
prednost pred jinymi elastomery. Dokonce si zachovaly i svuj puvodnıtvar pri
dlouhotrvajı
cı
m pouz itı
. Kalrez je velmi odolny proti ohni.
Jeho hustota je obecne okolo 2, je pretrz en az pri 150 % elongaci.
Obecne lze shrnout, z e tesnı
cıa elastická vlastnosti tohoto materialu lze tez ko popsat
uvedenı
m nekolika prı
kladu kompozic. Je predurc en vsude tam, kde nastavajıpotı
ze
s klasickymi tesnı
cı
mi materialy.
LITERATURA
http://www.dupont-dow.com/products/kalrez, http://www.matweb.com,
http://www.stateseal.com/kalrez.htm, 18. 4. 2001.
ZPRAVODAJ C VS 10 (3-4), 2001
str.22
VaQum
1.International Trade Fair for Vacuum Technology and Vacuum Applications in Magdeburg
17 - 19 June 2002
Realization of an idea: meeting point for the trade
Vacuum technology and its applications are important for all modern fields of hightechnology. These necessary base for all fields of industrial progress has never before had its
own trade fair as a platform for information, and until today, the expert had to visit several
trade fairs to get a general idea of the field.
The vaQum offers the opportunity to become familiar with modern trends of
development in the field of vacuum physics, vacuum technology, and its applications to
producers, service providers and users. The international trade fair for vacuum technology and
vacuum applications will be accompanied by several workshops and colloquiums on trends in
the field.
Hosting this trade fair, the Magdeburger Messebetriebesgesellschaft mbH & Co. KG is
working hand in hand with important partners of the industry, for example the VDMA
(German Engineering Federation) and the VDI (Association of German Engineers).
Potential exhibitors of the vaQum are companies, which develop, produce or sell
vacuum components or mechanical engineering for different applications, e.g. industrial
plants, research centers and sales companies for vacuum technology. The target audience for
the vaQum is European, American, and Japanese manufactures who sell their products in this
market.
The key exhibitions issues are: vacuum components such as pumps, total and partial
pressure gauges, fittings and appliances for analysis, vacuum plants for the physical
construction of apparatus, space and nuclear research; beam epitaxy technology,
semiconductor technology, high integrated micro electronics and micromechanical
components; solar panels and solar cells; pharmaceutical, food- and luxury food, wood and
chemical industries, production of ceramics; mechanical and electrical engineering and
electronics; finishing of material; agriculture and facility management; recycling; metallurgy
and metal processing; medicine technology; training, and further education in vacuum physics
and vacuum technology.
The visitors of the trade fair are sales representatives from different branches, who sell
vacuum products, but also include physicists, chemists, and engineers from all branches
which deal with vacuum plants or vacuum technologies, or want to use these technologies to
modernize their production.
The VDI is organizing a Ceremonial Colloquium for the 400th birthday of Otto-vonGuericke, and a workshop "Vacuum Technology in the Chemical and Metallurgical Industry"
within the accompanying program. And the European Society for Thin Films is organizing a
workshop "In-Line-Vacuum Coating and Plasma Treatment of Flexible Materials".
ZPRAVODAJ C VS 10 (3-4), 2001
str.23
Magdeburg celebrates the 400th birthday of Otto-von-Guericke The date for the first
trade fair for vacuum technology was a conscious choice. In 2002 are several activities and
celebrations in the capital of Saxony-Anhalt on the occasion of the 400th birthday of Otto von
Guericke. The former 17th century mayor of Magdeburg and inventor became famous with
his experiments on physics and vacuum theory. Numerous events are planned like the
spectacular "Experiment of the Magdeburger Hemisphere" or a guided tour in the Millenium
Tower, as well as a guided tour through the historical collection in the Lukasklause with
guides of the Otto-von-Guericke-Society. These events and the scientific program offer
exactly the proper surroundings for the first independent special trade fair for vacuum
technology and its applications.
ZPRAVODAJ C VS 10 (3-4), 2001
str.24
C eska vakuova spolecnost preje vs em
clenu m a ctenaru m hezke vanoce a
mnoho ěspýchu v nove m roce 2002.
vybor C VS
redakce Zpravodaje
Redakc ne pr ipravili :
RNDr. Pavel B. Drasar, CSc., SciTech, spol. s r. o., Nad Sarkou 75, 160 00 Praha 6,
tel. (02) 33330789, fax (02) 24311850, e-mail [email protected]
Mgr. JirıDrbohlav, KEVF MFF UK Praha, V Holesovickach 2, 180 00 Praha 8
tel. (02) 21912734, fax (02) 6685095, e-mail [email protected]
RNDr. Ladislav Peksa, CSc., KEVF MFF UK Praha, V Holesovickach 2, 180 00 Praha 8
tel. (02) 21912302, fax (02) 6685095, e-mail [email protected]